Description
Model EMG-4215, 30keV Electron Gun mounted on a 41/2CF flange
ELG-2/ EGPS-1022
1eV to 2000eV
New higher energy
Focusable, Zoom lens for energy sweeping
Beam: 1nA to 10µA
Constant current and approx. constant spot size over wide range in energy.
Spot size: 0.5 to 5mm
Deflection, Pulsing, Rastering
23/4CF Mounted, Demountable option
FRA-2X1-2 / EGPS-1011
5eV to 1000eV
Flood beam
Beam: 1nA to 400µA
100µA at 50eV
Spot size: 20mm at 50mm WD
Unmounted or CF Mounted
EGA-1106 / EGPS-1106
100eV to 2000eV
Flood beam, High current
Beam: 1nA to 2mA
Spot: 20mm at 50mm WD
11/3CF or 23/4CF Mounted or Unmounted
EFG-7 / EGPS-1017
50eV to 1500eV
Flood and Focusable
Beam current/ Spot sizes:
1nA to 100µA / 1 to 100mm
1nA to 1mA / 3 to 100mm
Deflection, Pulsing, Rastering
23/4CF Mounted, Demountable option
EFG-7 / EGPS-2017
100eV to 5000eV
Flood and Focusable
Beam current/ Spot sizes:
10nA to 100µA / 1 to 100mm
1µA to 1mA / 3 to 100mm
Deflection, Pulsing, Rastering
23/4CF Mounted
Demountable option
EGL-2022 / EGPS-2022
50eV to 5000eV
Focusable, Zoom lens for energy sweeping
Beam: 1nA to 100µA
Spot sizes: 1 to 10mm
Deflection, Pulsing, Rastering
23/4CF Mounted
EGA-1108 / EGPS-1108
