Description
EGH-8103 / EGPS-8103
10keV to 100keV
Focusable, Magnetic lens
Beam current/ Spot sizes:
10nA to 1mA / 500µm to 10mm
10nA to 100µA / 60µm to 10mm
Pulsing, Magnetic deflection
6CF Mounted
EGH-8105 / EGPS-8105
1keV to 100keV
Focusable flood beam
Beam: 50nA to 100µA
Spot size: 10 to 500+ mm
Beam washing for uniformity
Pulsing
6CF Mounted
EGH-8201 / EGPS-8201
10keV to 100keV
Focusable, Magnetic lens
Beam: 10nA to 1mA
Pulsed beam up to 20mA
Spot size: 1 to 100mm
Magnetic deflection,
Differential pumping,
6CF Mounted

EGH-8202 / EGPS-8202
10keV to 100keV
Focusable 2 lens system
Beam: 10nA to 1mA
Pulsed beam up to 20mA
Spot size: 1mm to 15mm
Magnetic deflection,
Differential pumping, gate valve
6CF Mounted
High Energy Electron Gun system with Power Supplies and
National Instruments LabVIEWTM computer control.




