Description
EGH-6005 / EGPS-6005
1keV to 50keV
Focusable flood beam
Beam: 1nA to 5mA
Spot size:10 to 500mm
6CF Mounted
EGF-6104 / EGPS-6104
NEW 1keV to 50keV
Uniform density flood beam
Beam current / Spot sizes:
Std:1nA to 200µA /15 to 50mm
HC: 10nA to 1mA / 15 to 50mm
23/4CF Mounted
EGH-6210 / EGPS-6210
NEW 1keV to 60keV
Focusable, Magnetic lens
Beam: 10µA to 6mA
Spot size: 50µm to 10mm
Differential pumping, Pulsing
Mag. deflection
Beam stigmation
EGH-8101 / EGPS-8101
10keV to 100keV
Flood beam

Beam: 10nA to 1mA
Pulsed beam up to 20mA
Spot size: 3 to 100mm
23/4CF, 41/2CF, or 6CF Mounted
EGH-8103 / EGPS-8103
10keV to 100keV
Focusable, Magnetic lens
Beam current/ Spot sizes:
10nA to 1mA / 500µm to 10mm
10nA to 100µA / 60µm to 10mm
Pulsing, Magnetic deflection
6CF Mounted
EGH-8105 / EGPS-8105




