DS200IAXSG3A GE

Motor Baugrobe 4300 Version 2.2

Ultratech item 0180502-3-01 PHD Inc.

ASML/SVG 4022.456.07242 8” Wafertable C.C. Flat TIN SSP

VAT Pneumatic Rectangular Gate Valve F02-76569-01

AMAT Part Number 0100-90970 Beam-Profiler Micro Control

VAT Pneumatic Rectangular Gate Valve F02-58413-03

ASML/SVG 4022.454.59231 Beam Steering Fixed Mirror

ASML 4022.437.0198 Power Amplifier Module SVG

AMAT Part Number 0090-90966 daq Mkll Type B

AMAT Part Number 9090-00889ITL daq Scan Efficiency

Description

TEC SEC-4400 Series Mass Flow Controller SEC-4400M

Optical Beam Splitter Cube Prism

ASML/SVG Optical Item 854-0141-001

ASML Lithography B.V. 4022.502.25208 Blue Mirror/40

Zeiss Beleuchtung Starlith 400 ASML 4022.455.84271

Zeiss Beleuchtung Starlith 400 ASML 4022.455.84291

Horiz Situation IND Model Rd. 700 4033169-902 Sperry

KLA Tencor Extender Card 710-711345-00

ASML 4022.430.1800 Motor Assy.

TEC SEC-4400 Series Mass Flow Controller SEC-4400M N2

ASML 4022.486.55123 Pressurized Glass SVG

Tokyo Electron WZ10-100360-11 Teaching Jig Window TEL

SVG/ASML 879-0008-003 Optical Assy.

ASML 4022.431.3185.1 Lamp Optics Lens 106524-8007

ASML 4022.470.8825 Module Card SVG

ASML/SVG 923-8244-001 Power Supply SMC

ASML 4022.480.0101 AWH Gripper Wrist LP Assembly SVG

TEC SEC-4400 Series Mass Flow Controller SEC-4400M He

ASML 4022.430.1422 Power PL Module SVG

ASML 4022.430.6602 Brushless Servomotor SVG

ASML 4022.471.6829 4 Channel Amp Control PPCA

ASML/SVG 4022.471.5027 TCB Syncbus Trigg