Description
Global-Wulfsberg Systems DTU 43000-01-01-3
SVG/ASML 859-9404-003 Vacuum Chuck
SVG/ASML 879-0014-002 Vacuum Chuck
New LAM 605-017016-100 PCB Stepper Motor Drive Chip
Lambda Alpha 1500W H07019 Power Supply
EZI Dry20 Dry Compact 2.0
Lam Research Wafer Chuck
ASML 4022.484.72232 AWH Gripper Wrist LP Assembly SVG
ASML 4022.486.57153 ATRS XT2 SSY Coil Assembly SVG
Nikon Optistation 3 MST PCB 2S700-55 (2S015-064-4)
ASML/SVG Module 4022..436.1064
Tokyo Electron Suscepter 16-0126-007 SUSC 150mm on 200
ASML 4022.486.5364 Optic mirror and sensor SVG
ASML 4022.436.2693 Module Board SVG Motion Controller
NEW LAM 715-007469-002 Lower Electrode 8” 4 pin Etch
ASML /SVG 4022.454.6940 ESA-X1

ASML/SVG 4022.431.20761 Cold Light Mirror 365
Eastern Air Brushless DC Motor DB31D-54
Novelis CU, GAARD ARM, DELRIN, DOGLEG
Omron R88DUA20V AC Servo Drive with cables
ASML 4022.456.39541 8” Wafertable Cont. Clamp Flat
Motor Baugrobe 4300 Version 2.2
Ultratech item 0180502-3-01 PHD Inc.
ASML/SVG 4022.456.07242 8” Wafertable C.C. Flat TIN SSP




