Description
PPI Technologies 12ft Solvent Bench Wet Process Bench
Novellus Concept Two 8″ 2 CVD-W Vacuum System
TEMESCAL FC-1800 Electron Beam Evaporator
KARL SUSS MA150 Cassette to Cassette Mask Aligner
KLA TENCOR Surfscan 6220 Unpatterned Surface Inspection
VEECO DIGITAL INSTRUMENTS Dimension 3100
Seiko SIR3000/SIR 3000 FIB Photomask Mask Repair System
SFI Endeavor 8600 Cluster Sputtering Tool
PlasmaTherm Unaxis Dual SLR 700 Etch System (RIE/PE)
Oxford Plasmalab System 90 Etch/Plasma RIE/PECVD System
Obducat NIL-4 Nano-Imprinter/Imprint Lithography System
OXFORD PLASMALAB 80 PLUS Reactive Ion Etcher
AG Associates Heatpulse 8108 RTP Rapid Thermal Annealer
Refurbished and upgraded AG Asociates Heatpulse 610
Allwin21 AW Software for AG Associates Heatpulse RTA
Gasonics Aura 2000LL for 8 inch wafer Plasma Asher
Cascade Microtech Auto Prober, Parametric Series PS21
LAM 4420 – Polysilicon Etcher
Polyflow Omniclean Quartzware Cleaner, Acid Etcher
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Heatpulse 610 RTA /RTP AG Associates /Steag Heat Pulse
NOVELLUS INOVA CVD TiN MODULE
AMAT 300MM E-CHUCK 0010-23066
AMAT 300MM E-CHUCK 0010-23677
Lam Research 4420 Complete Tool with Envision Software
TOKYO ELECTRON TEL ALPHA 8S HTO FURNACE TS 4000Z
