Description
LAM Lower Electrode Match Box 853-440656R001
Shimadzu Vacuum Turbopump TMP 280-L new
Brooks Automation Transfer Robot ABM-407B
Equipe Technologies Transfer Robot ATM-104
Brooks Automation Robot ABM-405-1-S-CE-S293
AE Apex 3513 RF Generator 3.5kW refurbished 0920-00005
AE HFV 8000 5kW RF Generator 3155083-109B
Equipe PRI Robot Controller ESC-218BT-FWS
Yaskawa Robot Controller PAC/ELC2 SRC-II 006 working
PRI Transfer Robot ATM-104-1 working
Brooks PRI 300mm Prealigner PRE-300B-CE working
Lam Advanced Energy 4MHz Bias Match 660-095275-005 New
Ebara A10S Vacuum Dry Pump tested working
Equipe PRI Automation 300mm Prealigner PRE-301B
AE Navigator RF Match 3155126-020A working 0190-19024
