Description
Seiko Seiki STP-301CB1 Turbo Pump & SCU-21D controller
ADVANCED ENERGY RFG-1250 HALO
DPS II RF Source Matching Network (0190-15168)
ADVANCED ENERGY PDW 2200 AE PDW 2200 LAM 660-015516-014
COMDEL CPS1001S 13.56mhz RF GENERATOR P/N 0190-70099
COMDEL CLX-2500 RF GENERATOR
COMDEL CLX2500 RF GENERATOR PART # FP1335R4
ADVANCED ENERGY PDW 2200 AE 3156011 Lam 853-015516-002
COMDEL CX1250S RF POWER SUPPLY
COMDEL CPS-500AS RF POWER SOURCE AMAT P/N 0190-13320
AMAT PART # 0200-20060 INSULATING QUARTZ 6″ SMF PC11
THERMCO PCB ASSEMBLY PART # 110568-005 Z-80 PROCESSOR
NOVELLUS NICKEL SPINDLE SHAFT
AMAT PART # 0200-35145 ADAPTER WINDOW 2mm RP CHAMBER
ADVANCED ENERGY PDX 500 RF GENERATOR
LAM PART # 770-008341-002 PNEUMATIC CYLINDER
AMAT PART #0200-20074 DOOR PRECLEAN CHAMBER QUARTZ
AMAT PART # 0020-24435 INSULATOR QUARTZ 8″
PARKER THREE WAY VALVE MODEL # 955Y3NC
THREE WAY VALVE AMAT PART # 3870-02221
NOVELLUS ANALOG INPUT PCB SLOT 6 PART # 19-00126-00
AMAT PART # 0200-35539 200mm BLADE ROBOT QTZ w/RADIUS
AMAT ENDURA COVER RING PART # 0020-24804
CENTURA SLIT VALVE DOOR PART # 0021-09922
AMAT PART # 0200-10455
