DSQC325 ABB

Kawasaki Wafer Prealigner 3NS004S-C001 working
KLA-Tencor 45-143224

RF Services Inc. RF Match RFS 5005, 5kW icp working

Brooks 300mm Wafer Aculigner Prealigner 002-7391-22
KLA-Tencor 750-614710-000

RF Services Inc. RF Match RFS 5005 5kW working

Comdel CLX-2500 LF RF Gen 2500W FP1335R4 0190-01370

Varian Turbo-V TV 250 Turbopump 9699007 working

Comdel CLX-2500 350KHz-LF RF Gen. FP1336R2 0190-02702

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Description

ENI OEM-12 RF Generator 1250W OEM-12-11491

Asyst 300mm Wafer Prealigner EG-300B-012A

TEL Tokyo Electron 125mm Back Plane Heater A121382

TEL Tokyo Electron 200mm Back Plane Heater A116007

ENI OEM-12A RF Generator 1250W

Nikon Dual Board Assembly PCB 9700-5327-01

Spectra-Physics Laser Power Supply 2560-60

Spectra-Physics 2560-56 Laser Power Supply

ENI OEM-12A RF Generator 1250W OEM-12AL-21311

ENI OEM-12 Solid State RF Generator OEM-12L

Tek-Temp Rack Mount Chiller RK-19 1600 BTU

Yaskawa 8-Axis Motion Controller SMC 2000-8MR

AMAT Quantum Leap III Beamline Shield Assy. 0040-94512

AMAT Quantum Leap III Shield Assembly

AE Navigator RF Match 3155132-001 untested 0920-00004

Metron 859 Dual Nozzle Assy. 814-01-013 new

Brooks Automation FixLoad 6 Load Port 002-7200-21