E3HAB8797-1 Drive unit DSQC 266B ABB

vacuum chamber Flange, Cryo Turbo, Gate valve interface

ISIOC RF HCM PVD-PVD RACK NOVELLUS 02-124572-00 REV. 1

ISIOC HCM APVD NOVELLUS 02-276954-00 REV. 1

ISIOC HI-LO TRANSFER NOVELLUS 02-131736-00 REV.A

SIOC WTS-HV SIOC 0 NOVELLUS 02-123962-00 REV. A

5 STEC MFC SEC-4400M C3F6, WF6, SiH4, used

Pfeiffer Balzers TPH 170 Turbo Pumps, PMP01210D619

MFC Mykrolis FC-2902MEP5-T, 5 SLPM, Gas N2 NEW lot of 2

MKS Foreline Heated Jacket, 2 Straight Line, 1 Elbow

Aligner up/down transmission #7458, 233435333

VME MOTOROLA 2304-900

2 NEW AMAT 0021-09552 Plunger throttle valve DPS cham

ENI OEM-650A RF Generator, ENI OEM-6A-11491-52, 750 W

Description

EDWARDS DP80 Dry Vacuum Pump, used, as is

ENI OEM-25A-21091-51 RF Generator, 2500 W, 13.56 MHz,

RFPP RF Generator ICP-20P Model# 8511139050, 2000 W

Advanced Energy PDW 600, AE 3156014 Lam # 853-15516-003

ENI OEM-12B-07 RF Generator, 1200W at 13.56 MHz

Lot of 6 MFC, UNIT UFC-1660, N2, Cl2, He Unit MFC

Lot of 6 MFC, UNIT UFC-1660, O2, Cl2, Unit MFC

ENI OEM-12B-02 RF Generator, 1250W at 13.56 MHz, used

ENI GHW-12Z Genesis RF Generator 1250W, AMAT 0190-09832

ROLLER BRUSH CELL HDSIOC NOVELLUS 02-336512-00 REV. 1

HDSIOC ROLLER BRUSH NOVELLUS 02-308058-00 VERSION 4.72

XCEDA FAC HDSIOC NOVELLUS 02-309772-00 VERSION 4.72

ISOC HI-LO TRANSFER NOVELLUS 02-131736-00 REV. A

PDL OXIDE HDSIOC 3 NOVELLUS 02-273741-00 VERSION 4.72

ISIOC DAMA CLEAN BB-DFE DIGITAL DYNAMICS G19-10000-00

APPLIED ENERGIES 750V 3153110-001

Pfeiffer TCP 600 Turbo pump Controller

ENI DCG-200 DC Plasma Generator, AMAT 0190-08033

AE Advanced Energy MDX-20K Master 3152223-003-Y, used

AE Advanced Energy MDX-20K Master, AE Model 3152223-003

AE Advanced Energy MDX-10K Master, AE Model 3152012-041

LAM 852-014681-583 RF Generator ENI OEM-6A-11491-52