E3HAB8802-1 Drive unit DSQC 266T ABB

UNIT 1660 UFC-1660 He 10 SLPM with calabration sheet

Novellus Controller I/ 0 Daulcap Firmware Version 4.8

SMC NP420-DN1 VV5Q11-ULB00004​7

SMC NP420-DN1 VV5Q11-ULB98018​0

MASS FLOW CONTROLLER 5877, He, 10 SCCM lots of 2 USED

UNIT MFC UFC-8165, 10L, Gas N2, NEW in box

UNIT UFC – 7000 industrial MFC, H2, 1.00 SLM, NEW

BOC EDWARDS interface module, U20000521 used

UNIT UFC-1660 CL2 200 SCCM and O2 50 SCCM, lots of 2

UNIT UFC-1660 CL2 200 SCCM and O2 1 SLPM, lots of 2

MKS Baratron 627A01TBC, 1 TORR with connection valves

Granville Phillips 370149 Vacuum Gauge controller, used

USED Kollmorgen Magnet Driver AMAT 0190-70060

MKS MFC DPCA12T51CB00, AMAT 3030-10854, 50 sccm He

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Description

SHB INSTRUMENTS MODLE 109 SCOPE

ASYST TECHNOLOGY P/N 01270-001, Cassette loader,

CTI ON-BOARD NETWORK TERMINAL CONNECTOR

Bentek DC PC BOARD, reliance, 03-188758-00, Novellus

UNIT UFC-8160, NF3, SiH4, PH3, lots of 3, used

PB02807 BM18164 DAN 9710094

BM26015/L AB26015/N ASSY, H-STN XORB-100

BM302960000 /D 9923DAN

502622 BM303030200

AMETEK 80440K 94V-0, REV B

19801004800874 JZ29A-01 MEIDEN, MU24A30756

FABR 016763 REV A

DSC-002 99A5 PCB BOARD

PTI4 4896

PROM DISK 66700301

TYLAN 2979M Mass Flow Controller FC-2979MEP5-WM, Gas O2

Phasetronics P1229 Driver, AMAT 0190-05682, 2 unit

Terranova 934 wide range vacuum gauge controller used

LAM 685-094680-001 LIGHT PEN 0080025890 interface PCB

MYKROLIS intelli flow 3XP, N2 1000SCCM lots of 2 used

NOVELLUS ISIOC HI-LO Transfer 02-150755-00 REV.A

ISIOC Power supply, 02-125105-00, 27-053659-00 used

NOVELLUS Controller I/O DUALCAP 27-156710-00, REV.C

MKS BARATRON 624A21TBC, 20 TORR, CALIBRATION SHEET.

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