FPR3316101R1032 ICSI16E -24 ICSI16E1 Input Unit ABB Procontic 4 ABB

Allen Bradley PC Board Snubber 1336-SN-SP16A (3248)

Honeywell Temperature Process Control 5140430 (2858)

1 EMERSON SERVO DRIVE DB-140 (2416)

Schneider Output Module QUANTUM 140 DDO 353 00 (2759)

Cutler Hammer Circuit Breaker HFD315OL 150 AMP (2990)

Siemens Control Board Servo Drive 6SN-01118-OAA11​-OAA1

ABB Power Connection Board 58130453 SAFT 190 APC (3493)

GE PC Board 269PLUS-120N120 Motor Relay PC Card (3249)

RELIANCE ELECTRIC BATTERY BACKUP 803623-R *

Schneider Input Module 8CH 140 ATI 03000 (2761)

Moog Control Panel D122F022-A014 (3440)

Fanuc Velocity Control Servo Control A20B-0009-0320/​10D

Square D Circuit Breaker MAL36800 800A 3 P 600V (3220)

Powertec Brushless DC Drive C0002.5N2-N1012 2HP (3396)

Telemecanique Contactor LCIF400 (3226)

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Description

TEL I/F board 2981-600392-11

Sigma Koki leveling stage

Thermalogic RA2015-03 P/N: 121-201X

PLMS GC420 card

Lam research 810-190572-001

Millipore VC-4900VR 1000SCCM gas: H20 VAPOR

Millipore FC-2900M 100SCCM Gas: BCL3

Omron C200H-CPU01-E & C200H-MR831

Aera TC FC-981 20 SLM Gas: O2

Mitsubishi AC Servo Drive MR-J2S-40A

Nikon Motorized Objective Turret

Diversified technology CXT100A Tencor tech 156256 Rev C

Inspex s/no. 3085709A02 & vexta PX243M-01AA

Siemens SM335 6ES7335-7HG01-0​AB0

Siemens ET 200M IM 153-1 6ES7153-1AA03-0​XB0

DIRECT LOGIC 405 CPU MODULE D4-440

Mykrolis FC261 4V Viton 20SLPM N2 NEW

KNIEL C5.5 101-013-02.03

KNIEL CD15.1 120-009-02.03

Tencor Instruments assy 077054 Rev. E

DY-4 DY00469-H-A1-3

DY-4 DSTD103004 DY00485-H-A1-3

Electroglas Theta Z inker drivers assy 244736-001

Electroglas Pre-align driver assy 244639

Electroglas PL Temp logic mux assy 246713-001

Electroglas motion control assy 102944-001

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