Description
Equipe PRI Robot Controller ESC-218BT-FWS working
Yaskawa Robot Controller PAC/ELC2 SRC-II 006 working
Lam Advanced Energy 4MHz Bias Match 660-095275-005 New
Brooks PRI 300mm Prealigner PRE-300B-CE working
Ebara A10S Vacuum Dry Pump tested working
Equipe PRI Automation 300mm Prealigner PRE-301B
AE Navigator RF Match 3155126-020A working 0190-19024
Daihen RF Match RMN-50N4 working 0190-19174
AE HFV 8000 RF Generator 3155083-111A 5kW 0190-09841
Yaskawa Robot Controller XU-CN1110A working
Leybold Turbopump Controller MAG.DRIVE digital new
Sumitomo Electric Industries, Ltd. ADE1 H Control Unit
MECS Corp. UTV-2500H Robot Controller CS-7000 working
Nikon 4S587-171-1 Linear Motor Driver X32D1-0001
Newport Kensington Robot 35-3700-1425-18 rfb 0190-22248
Newport Kensington Robot 15-3701-1425-25 refurbished
CTI-Cryogenics On-Board P300 Cryopump 0190-12086
Nikon NSR 200mm Wafer Prealigner Z-8XB-D4915 working
Yaskawa Robot Controller XU-CM7001 working
AE VHF 2060 RF Generator 3150852-005A 0190-14416
Asyst Transfer Robot UTX-F5500-16 working 0190-14191
Atto Purex Ar Gas Purifier AP-RM-050 working
LAM Lower Electrode Match Box 853-440656R001 Refurbshd
