Description
AE Ovation 35162 RF Generator 3150861-002A 0190-27049
AE RF Match 3155031-037A not working 1110-00056
AE RF Match 3155031-037A untested 1110-00056
Metron 859 Multi Nozzle Assy. 814-01-014 new
Ebara Vacuum Turbopump ET600WS need rebuild
KLA-Tencor NEAT CRS1010 200mm Wafer Stage Controller
Ebara Vacuum Turbopump Controller 305W-A working
Shimadzu Vacuum Turbopump Controller EI-D3603M new
Nikon NSR Stepper Power Controller RRW-07 working
Nikon Stepper Controller Z-X3-B2405 working
Schumacher ChemGuard Bulk Chemical Delivery working
Hitachi 1-823775 PCB I/O Unit W/ 7 Boards Included New
Hitachi Upper Coil, ZPS90 New
Accu-Fab Systems Accubot Transfer Robot untested

Newport 300mm Wafer Robot 15-3701-1425-25 0190-19124CW
Newport 300mm Wafer Handling Robot 15-3702-1425-25
AMAT P5000 RF Match Network 0010-39750
AE Ovation 35162 RF Generator 3150861-002B 0190-16109
AMAT Spur Gearing Pressure Drive 3970-00039 working
Brooks 200mm Wafer Indexer 8600-65BAJ working
Lam Slit Valve, HTD, Viton, Anod E9600 796-098150-002
Lam Research Quartz Focus Ring 716-443234-001 New
ENI Genesis GHW-12Z RF Gen. 1250W 13.56MHz 0190-09832
ENI GHW-12Z RF Generator 1250W working 0190-25528




